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Deceleration lens system
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product name: Deceleration lens system
product category: ion optic components
catalog no.: 21001
datasheet: datasheet n/a


The deceleration system consists of two deceleration units each employing 5 lens segments. Each unit realizes a deceleration factor of 10 which can be extended up to 20 but with reduced beam quality; mounted on a CF100 flange.

The second unit is movable along the beam axis by 40 mm.

The center segment of the second unit comprises an x-y-deflection.

The first segment of the first deceleration unit is at beam line potential. The last segment of the first unit and the first segment of the second unit are at the same potential.

The deceleration system includes a CF100 cross piece, two CF100 bellows, several CF reducing flanges and voltage feedthroughs as well as a rotary feedthrough.

The high voltage supplies include 8 supplies with different output ranges and two bipolar supplies for the x-y-deflection.


the scope of delivery includes:



product images:

Deceleration lens system
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Deceleration lens system
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